Next-generation nanoimprint lithography: Innovative approaches towards improving flexibility and resolution of nanofabrication in the sub-15-nm region | ISBN 9783932749957

Next-generation nanoimprint lithography: Innovative approaches towards improving flexibility and resolution of nanofabrication in the sub-15-nm region

Buchcover Next-generation nanoimprint lithography: Innovative approaches towards improving flexibility and resolution of nanofabrication in the sub-15-nm region  | EAN 9783932749957 | ISBN 3-932749-95-2 | ISBN 978-3-932749-95-7

Next-generation nanoimprint lithography: Innovative approaches towards improving flexibility and resolution of nanofabrication in the sub-15-nm region